Carbon Nanotube Integration with a CMOS Process
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چکیده
منابع مشابه
Carbon Nanotube Integration with a CMOS Process
This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties ...
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Carbon nanotubes are a recently discovered material with excellent mechanical, thermal, and electronic properties. In particular, they are potential ballistic transporters and are theorized to have thermal conductivities greater than any other material currently known. In this thesis, we will examine two possible applications of carbon nanotubes in CMOS back-end processing. The first applicatio...
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ژورنال
عنوان ژورنال: Sensors
سال: 2010
ISSN: 1424-8220
DOI: 10.3390/s100403857